I found one fix here https://www.sitecorespark.com/blog/2019/8/sitecore-9-installation-xconnect-services-wont-start Below line must be placed before the `InstallServices` task "SetIndexWorkerServicePermissionsFolder": { "Description": "Set permissions for the Index Worker service folder.", "Type": "FilePermissions", "Params": { "Path": "[joinpath(variable('Services.IndexWorker.InstallPath'))]", "Rights": [ { "User": "NT AUTHORITY\\LocalService", "FileSystemRights": [ "FullControl" ], "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ] } ] } }, "SetMarketingAutomationServicePermissionsFolder": { "Description": "Set permissions for the Marketing Automation service folder.", "Type": "FilePermissions", "Params": { "Path": "[joinpath(variable('Services.MarketingAutomationEngine.InstallPath'))]", "Rights": [ { "User": "NT AUTHORITY\\LocalService", "FileSystemRights": [ "FullControl" ], "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ] } ] } }, "SetProcessingEngineServicePermissionsFolder": { "Description": "Set permissions for the Processing Engine service folder.", "Type": "FilePermissions", "Params": { "Path": "[joinpath(variable('Services.ProcessingEngine.InstallPath'))]", "Rights": [ { "User": "NT AUTHORITY\\LocalService", "FileSystemRights": [ "FullControl" ], "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ] } ] } },