I found one fix here

https://www.sitecorespark.com/blog/2019/8/sitecore-9-installation-xconnect-services-wont-start

Below line must be placed before the InstallServices task

 "SetIndexWorkerServicePermissionsFolder": {
        "Description": "Set permissions for the Index Worker service folder.",
        "Type": "FilePermissions",
        "Params": {
            "Path": "[joinpath(variable('Services.IndexWorker.InstallPath'))]",
            "Rights": [
                {
                    "User": "NT AUTHORITY\\LocalService",
                    "FileSystemRights": [ "FullControl" ],
                    "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ]
                }
            ]
        }
    },
    "SetMarketingAutomationServicePermissionsFolder": {
        "Description": "Set permissions for the Marketing Automation service folder.",
        "Type": "FilePermissions",
        "Params": {
            "Path": "[joinpath(variable('Services.MarketingAutomationEngine.InstallPath'))]",
            "Rights": [
                {
                    "User": "NT AUTHORITY\\LocalService",
                    "FileSystemRights": [ "FullControl" ],
                    "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ]
                }
            ]
        }
    },
    "SetProcessingEngineServicePermissionsFolder": {
        "Description": "Set permissions for the Processing Engine service folder.",
        "Type": "FilePermissions",
        "Params": {
            "Path": "[joinpath(variable('Services.ProcessingEngine.InstallPath'))]",
            "Rights": [
                {
                    "User": "NT AUTHORITY\\LocalService",
                    "FileSystemRights": [ "FullControl" ],
                    "InheritanceFlags": [ "ContainerInherit", "ObjectInherit" ]
                }
            ]
        }
    },